| |
Abstract
Final qualifying work of the bachelor : 22 pages, 13 images, 8 tables, 3 appendixes, 8 sources.
Results of development of the hardware of the automated system for investigation of electric properties of the devices constructed on the basis of structures with tunnel-thin dielectrics are given. The developed hardware part of system executes functions on unification of the data exchange protocol between measuring devices and PC. Produced interface board meets all requirements which were put to the hardware part of system and will be used in system for investigation of structures with dielectric layer thickness from 15 up to 75 A.
Keywords: tunnel-thin dielectrics, MTDS structure, structures with thin dielectrics, measurement of electrical properties, automation, microcontroller, interface board
Also you can get abstract for this work in Ukrainian as a PDF file (61 Kb).
|
